216 fps 672 × 512 pixel 3 μm Indirect Time-of-Flight Image Sensor with 1-Frame Depth Acquisition for Motion Artifact Suppression

Abstract

A 216 fps, 672 × 512 pixel, 3 μm indirect time-of-flight image sensor with 1-frame depth acquisition for motion artifact suppression was developed for versatile applications. To suppress motion artifacts, we employed a floating diffusion sharing circuit, vertical gate technology for the transfer gate, and IQ mosaic pixel coding with demosaic processing. Consequently, a motion artifact-free depth map was obtained, with a 3.5 times faster frame rate, 50% lower power, and 71% lower readout noise compared to a conventional 4-frame sensor.