Waveguide Bragg Grating Optical MEMS Accelerometer based on Circular Diaphragm

Abstract

Design and analysis of optical MEMS accelerometer based on waveguide Bragg grating integrated with circular diaphragm with embossed centre mass for vibration measurement are presented in this paper. A waveguide Bragg grating is positioned on the top surface of the embossed proof-mass to maximize strain sensitivity. A reference grating on the substrate is used to compensate for the temperature dependence of Bragg peak. Due to excellent linear response, sensitivity of −180 pm/kG and a natural frequency of 4.8 kHz, the proposed accelerometer is suitable for vibration measurement.