{"title":"Surface Roughness and X-Ray Scattering","authors":"E. Church, P. Takacs","doi":"10.1364/pxrayms.1992.tuc1","DOIUrl":null,"url":null,"abstract":"Interface roughness and diffusion limit the performance of x-ray multilayer (ML) stacks by generating unwanted scattering and reducing their efficiencies.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"98 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physics of X-Ray Multilayer Structures","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/pxrayms.1992.tuc1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Interface roughness and diffusion limit the performance of x-ray multilayer (ML) stacks by generating unwanted scattering and reducing their efficiencies.
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