ANALYSIS OF CLUSTER DIMENSION AND MORPHOLOGY OF ROOM TEMPERATURE GROWN NANOCARBON USING CATHODIC ARC AND ITS INFLUENCE ON FIELD ASSISTED ELECTRON EMISSION

S. Niranjana, De Shounak, V. Moorthy, U. Niranjan, B. Satyanarayana
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引用次数: 3

Abstract

Low temerpatuere grown nanocluster carbon thin films grown using a continuous cathodic arc process at room temperature are found to be interesting material for wide range of and nanoelectronic application. Reported is the study of the influence of background gases such as helium and nitrogen on the nanoclsuter dimension and morphology and a possible influence of the -4 same to field assisted electron emission properties. The Helium partial pressure was changed from 5x10 to 50 Torr under two -4 -3 different nitrogen partial pressure conditions namely 1x10 Torr and 1x10 Torr respectively. Raman and SEM data for these samples were used to estimate the cluster dimension structural and morphological properties. The surface morphology of the films grown, varied from atomic smooth surface to clusters with varying sizes (50–200 nm). A methodology for the estimation of cluster dimension from the Raman data was established and the estimated data compared with dimensions derived from SEM images. Effort was made to look at the possible correlation of between process parameters, estimated parameters and field assisted electron emission data. The curve fitting analysis and the observed correlation, indicates possibility of establishing Raman Spectroscopy as an instantaneous characterization approach for the evaluation of nanocarbons.
阴极电弧室温生长纳米碳簇维数和形貌分析及其对场辅助电子发射的影响
室温连续阴极电弧法制备的低温纳米簇碳薄膜是一种具有广泛应用前景的纳米电子材料。报道了背景气体如氦和氮对纳米团簇尺寸和形貌的影响,以及-4 same对场辅助电子发射特性的可能影响。在1 × 10 Torr和1 × 10 Torr两种-4 -3种不同的氮气分压条件下,氦气分压由5 × 10变为50 Torr。利用这些样品的拉曼和扫描电镜数据来估计聚类维数、结构和形态性质。生长的薄膜表面形貌从原子光滑表面到不同尺寸的团簇(50-200 nm)不等。建立了一种从拉曼图像估计聚类维数的方法,并将估计的数据与SEM图像的维数进行了比较。努力寻找工艺参数,估计参数和场辅助电子发射数据之间可能的相关性。曲线拟合分析和观察到的相关性表明,建立拉曼光谱作为纳米碳评价的瞬时表征方法是可能的。
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