A study of fluorine dose and implant energy to the NBTI upon p+ implant sequence

Abstract

Negative Bias Temperature Instability (NBTI) is one of the major issues related to p-channel metal-oxide-semiconductor (PMOS) reliability that has been discussed for more than 40 years. In this paper, we discussed the effect of fluorine (F) co-implant to the NBTI improvement, capacitance and silicon oxide (SiO2) thickness in term of F concentration, implant energy and also implant sequence at p+-region. Results suggest that, besides F dose and implant energy that is known to contribute to NBTI behaviors; implant sequence also plays a role in NBTI degradation.