Multi-force-field assisted self-assembly process of thermoelectric device

Abstract

This study presents a dynamic multi-force field platform for micro thermoelectric generator (μTEG) assembly. The platform consists of a guide template and an alignment template. The dynamic force fields are provided by gravitational force and magnetic force. The thermolegs are confined by an anti-static ITO cubical well. Without using any redundant thermolegs, the assembly process can achieve 100% yield within 13 minutes. P-type and N-type TEG legs are assembled and transferred to the top and bottom electrodes, respectively. After hot pressing, a 6×6 and a 10×10 Bi2+xTe3-x μTEG array are packaged for testing. The TEG array generates a power of 1.29 mW for a ΔT of 65.9°C under optimized external load of 22.3 Ohm.