Direct bonding for wafer level 3D integration

Abstract

3D integration is a promising and fast growing field that addresses the convergence of Moore's Law and more than Moore. 3D integration offers higher performance, higher density, higher functionality, smaller form factor, and potential cost reduction. With this emerging field, new and improved technologies will be necessary to meet the associated manufacturing challenges. This paper describes some 3D building blocks describing oxide to oxide and metal to metal bonding with alignment