Enhanced UV-blue response of back illuminated deep double junction CMOS compatible photodiode pixels; a simulation study of high resolution pixel arrays

Abstract

Simulated backwall U/V blue illuminated double junction photodiode (DJPD) pixels demonstrate excellent crosstalk and sensitivity when substrate, guard and image wells were doped more highly and biased minimally. This configuration minimized each guard and image well depletion region (SCR) width, soSimulated backwall U/V blue illuminated double junction photodiode (DJPD) pixels demonstrate excellent crosstalk and sensitivity when substrate, guard and image wells were doped more highly and biased minimally. This configuration minimized each guard and image well depletion region (SCR) width, so that the image SCR could be presented as close as possible to the back wall without the guard and image SCRs overlapping between and within pixels. that the image SCR could be presented as close as possible to the back wall without the guard and image SCRs overlapping between and within pixels.