{"title":"In-Situ Raman Microprobe Analysis of Direct Laser Writing","authors":"I. Herman","doi":"10.1364/lmd.1987.thb1","DOIUrl":null,"url":null,"abstract":"Raman scattering is a versatile, non-destructive diagnostic of semiconductors and other materials, which can be used either in-situ after processing has occurred or, in many circumstances, in real-time during processing. By proper selection of lasers and optical design, Raman microprobe methods may be used to investigate sample stoichiometry, doping, crystallinity, stress, and temperature with micron or sub-micron lateral and depth resolution. The use of Raman microprobe techniques to analyze microstructures made by direct laser writing and to analyze microstructures heated by localized laser irradiation is described here.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Topical Meeting on Lasers in Materials Diagnostics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/lmd.1987.thb1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Raman scattering is a versatile, non-destructive diagnostic of semiconductors and other materials, which can be used either in-situ after processing has occurred or, in many circumstances, in real-time during processing. By proper selection of lasers and optical design, Raman microprobe methods may be used to investigate sample stoichiometry, doping, crystallinity, stress, and temperature with micron or sub-micron lateral and depth resolution. The use of Raman microprobe techniques to analyze microstructures made by direct laser writing and to analyze microstructures heated by localized laser irradiation is described here.