Analysis of a piezoelectric micro-pump by using ANSYS

Abstract

The micro-pump is an important drive component in the micro fluidics system. The piezoelectric drive is mainly employed as the actuator in MEMS devices. In this paper, a MEMS-based micro-pump with the attached PZT ceramic plate for drive is proposed. With the ANSYS software, a finite element model for this piezoelectrically driven micro-pump is established, and the vibration and coupled-field analyses are carried out in a cycle of vibration/driving to obtain the displacement of driving PZT/Si film and the liquid flow distribution inside the pumping cavity. The results show this proposed micro-pump has very good performance in driving fluid and can be used in micro fluid systems.