Analytical approximation of cross sections of collisions of electrons with atoms of inert gases

Abstract

The paper presents an analysis of data on the cross sections of elastic and inelastic collisions of electrons with noble gas atoms. The transport (diffusion) cross sec-tion, the excitation and ionization cross sections are considered. For the selected sets of experimental and theoretical data, optimal analytical formulas are found and approximation coefficients are selected for them. The obtained semi-empirical formulas allow us to reproduce the cross section values in a wide range of colli-sion energies from 0.001 to 10000 eV with an accuracy of several percent.