Tungsten-rich deposits at anode using carbon nanotube emitters

Abstract

Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyl (W(CO)/sub 6/) and dimethyl-gold ((CH/sub 3/)/sub 2/(C/sub 5/H/sub 7/O/sub 2/)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the compositions of deposits are analyzed. To improve the resolution of the deposit and to reduce energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. Factors influencing field emission characteristics of MWNT emitters are analyzed. In the deposit at anode by using W(CO)/sub 6/, mass of the tungsten reaches up to about 80% among the compositions.