Dynamic deformation of scanning mirrors

Abstract

Summary form only given. MEMS mirrors are capable of scanning at frequencies greater than 34 kHz. Both diffraction and dynamic deformation are dependent on the mirror size; increasing the mirror length decreases diffraction, but increases dynamic deformation. This paper presents an analytical formulation of mirror dynamic deformation for sinusoidally scanning rectangular mirrors, and measured data that corroborates the derived model. With this equation for dynamic deformation, we determine the optimal mirror size for a given scanning frequency, and the maximum achievable frequency of operation for a desired optical resolution.