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A GaAs Device Isolation Technique by Liquid Phase Chemical-Enhanced Oxidation

30th European Solid-State Device Research Conference Pub Date : 2000-09-11 DOI:10.1109/ESSDERC.2000.194807
H. Wang, D. Chou, J. Wu, Y.H. Wang, M. Houng
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液相化学强化氧化的砷化镓器件分离技术
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30th European Solid-State Device Research Conference
30th European Solid-State Device Research Conference
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