Reducing the normal acceleration sensitivity of surface transverse wave resonators using micromachined isolation systems

Abstract

Micromachined silicon platforms provide two methods for reducing the acceleration sensitivity of surface transverse wave resonators, First, micromachining allows precise control over the structure of the silicon mounting platform and supports. The platform can thus be shaped to apply stresses to the resonator such that the minimum acceleration sensitivity is achieved. Second, a platform supported by flexibie arms acts as a vibration isolation system, thus reducing the effective acceleration applied to the resonator. A study of a silicon micromachined isolation platform has been performed. Numerical analysis has been used to determine the effect of stress on the resonator, while a mass spring model has been used to predict the effective acceleration applied to the resonator.