Reactive liquid crystal materials for optically anisotropic patterned retarders

Lithography Asia Pub Date : 2008-11-20 DOI:10.1117/12.805378
R. Harding, Iain Gardiner, H. Yoon, T. Perrett, O. Parri, K. Skjonnemand
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引用次数: 6

Abstract

Merck has developed a range of reactive liquid crystal materials (Reactive Mesogens) that are designed to form thin, birefringent, coatable films for optical applications. Reactive Mesogen (RM) films are typically coated from solution and polymerized in-situ to form thin, optics-grade coatings. Merck RM materials are customized formulations including reactive liquid crystals, surfactants, photoinitiators and other proprietary additives. Merck have optimized the materials to achieve the optimum physical performance in each application. In this paper we focus on the optimization of RM materials to achieve the finest patterning resolution and defined feature shape whilst maintaining good physical properties of the films. Several conventional trade-offs are investigated and circumvented using novel material concepts. Different methods of patterning RM materials are discussed and the merits of each considered. Thermal annealing of non-polymerized regions can create isotropic islands within the polymerized anisotropic matrix. Alternatively, the non polymerized material can be re-dissolved in the coating solvent and rinsed away. Each of these techniques has benefits depending on the processing conditions and these are discussed in depth.
光学各向异性图案缓速器用反应性液晶材料
默克公司开发了一系列反应性液晶材料(反应介原),用于光学应用,形成薄的、双折射的、可涂层的薄膜。反应介源(RM)薄膜通常是由溶液涂覆和原位聚合形成薄的光学级涂层。默克RM材料是定制配方,包括反应性液晶、表面活性剂、光引发剂和其他专有添加剂。默克对材料进行了优化,以在每种应用中实现最佳的物理性能。在本文中,我们重点研究了RM材料的优化,以实现最佳的图案化分辨率和定义的特征形状,同时保持薄膜的良好物理性能。研究了几种传统的权衡,并使用新颖的材料概念进行了规避。讨论了RM材料的不同图案化方法,并考虑了每种方法的优点。非聚合区域的热退火可以在聚合的各向异性基体内产生各向同性岛。或者,可以将未聚合的材料重新溶解在涂层溶剂中并冲洗掉。根据加工条件的不同,每种技术都有各自的优点,我们将对此进行深入讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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