The characterization of laser-deposited thin sensitive layers of gas sensors

ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat. No.00EX386) Pub Date : 2000-10-16 DOI:10.1109/ASDAM.2000.889482

M. Vrňata, V. Myslík, F. Vysloužil, M. Jelínek, J. Lančok

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Abstract

The aim of this work is to investigate the properties of gas sensors with active layers prepared by pulsed laser deposition (PLD) technology. The active layers were deposited on planar sensor chips with interdigital platinum electrodes. The deposition was carried out from tin dioxide (SnO/sub 2/), indium sesquioxide (In/sub 2/O/sub 3/), tin acetylacetonate (SnAcAc) and indium acetylacetonate (InAcAc)-based targets by KrF excimer laser. Our interest was focused on the following problems: detection of hydrogen and ozone, the changes of maximal sensitivity S/sub max/ and the temperature of maximal sensitivity T/sub max/ as a result of using dopants and catalyst, low-temperature of maximal sensitivity T/sub max/ as a result of using dopants and catalyst, low-temperature (about 100/spl deg/C) sensitivities and ac-measurements of sensors (real and imaginary part of complex impedance for different frequencies).

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激光沉积气体传感器薄敏感层的表征

本工作的目的是研究脉冲激光沉积(PLD)技术制备的有源层气体传感器的性能。有源层被沉积在带有数字间铂电极的平面传感器芯片上。采用KrF准分子激光对二氧化锡(SnO/sub 2/)、倍半氧化铟(In/sub 2/O/sub 3/)、乙酰丙酮锡(SnAcAc)和乙酰丙酮铟(InAcAc)基靶材进行沉积。我们的兴趣集中在以下几个问题上:氢和臭氧的检测，掺杂剂和催化剂对最大灵敏度S/sub max/和最大灵敏度T/sub max/温度的影响，掺杂剂和催化剂对最大灵敏度T/sub max/温度的影响，低温(约100/spl℃)灵敏度和传感器的交流测量(不同频率下复阻抗的实部和虚部)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat. No.00EX386)

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