Wafer-applied underfill film laminating

R. Zenner, B. Carpenter, A. Chaudhuri, F. Stepniak, S. Post, J. Johnson
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引用次数: 4

Abstract

Wafer-applied underfill systems for flip-chip bonding have been developed to overcome throughput limitations imposed by capillary underfill systems. The wafer-applied underfill system consists of a highly filled film laminated to a bumped IC wafer and a liquid flux adhesive dispensed on the board. The wafer is diced after film lamination and the individual chips carry the underfill through the assembly process. The flux adhesive is dispensed at the bond site just prior to chip placement. These underfill materials undergo most or all of the required cure through a single reflow oven pass. A critical concern for a successful wafer-applied underfill bond is the prevention of discontinuities or voids in the underfill layer. Voids in the underfill can weaken the solder reinforcement otherwise provided by the underfill or permit the formation of between-bump shorts caused by solder extruding into the void. The wafer-applied underfill film laminating process presents one possible source for discontinuities. Since the film is laminated to a bumped wafer, the complete encasement around each solder bump by the wafer-applied underfill film is a necessity. A lamination process used to transfer the wafer-applied underfill film to the bumped wafer without such discontinuities will be described. This lamination process has been shown to provide uniform lamination over a full wafer with complete encasement of the solder bumps. Wafer-applied underfill and flux material characteristics and reliability results also will be reported.
硅片衬底覆膜
用于倒装芯片键合的晶圆应用下填充系统已经开发出来,以克服毛细管下填充系统所施加的吞吐量限制。晶圆应用的下填充系统由高度填充的薄膜层压到凸起的IC晶圆和涂在板上的液体通量粘合剂组成。晶圆片在薄膜层压后被切成小块,各个芯片在组装过程中携带下填料。在贴片放置之前,将助焊剂涂在粘合部位。这些底填材料通过一次回流炉通道完成大部分或全部所需的固化。一个成功的衬底胶结的关键问题是防止衬底层的不连续或空洞。底部填充物中的空洞可以削弱由底部填充物提供的焊料增强,或者允许由于焊料挤压到空隙中而形成凸起之间的短路。应用硅片的下填充薄膜层压工艺是不连续性的一个可能来源。由于薄膜被层压到凸起的晶圆上,因此必须在每个焊料凸起周围涂上衬底填充薄膜。将描述一种层压工艺,用于将硅片施加的下填充膜转移到凹凸的硅片上,而没有这种不连续性。这种层压工艺已被证明可以在整个晶圆片上提供均匀的层压,并完全封装焊料凸起。应用硅片的下填料和助焊剂材料的特性和可靠性结果也将被报告。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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