A 1mW Dual-Chopper Amplifier for a 50-/spl mu/g/spl radic/Hz Monolithic CMOS-MEMS Capacitive Accelerometer

Abstract

This paper reports a novel dual-chopper amplifier (DCA) for CMOS-MEMS capacitive accelerometers. A DCA prototype integrated with a single-axis accelerometer has been fabricated using TSMC 0.35 mum CMOS process. The DCA achieves a 16nV/radicHz input-referred noise at 20 Hz with a power dissipation of only 1 mW. The measured accelerometer noise floor is 50 mug/radicHz down to 5 Hz