Software for Silicon Ingots Parameters Measuring Equipment

2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials Pub Date : 2007-08-20 DOI:10.1109/SIBEDM.2007.4293005

V. Anishchik

引用次数: 0

Abstract

Modernization of software for non- equilibrium charge carrier lifetime in silicon ingots measuring equipment was implemented. Reliability and speed of measuring system were increased. New methods of lifetime calculation were added. Software features were expanded.

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硅锭参数测量设备软件

实现了硅锭测量设备非平衡载流子寿命软件的现代化。提高了测量系统的可靠性和速度。增加了新的寿命计算方法。扩展了软件功能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials

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