Adsorbed mass and resonant frequency fluctuations of a microcantilever caused by adsorption and desorption of particles of two gases

Z. Djuric, L. Jokić, M. Frantlović, O. Jakšić, D. Vasiljević-Radović
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引用次数: 6

Abstract

Microcantilever resonant frequency and mass fluctuation caused by adsorption and desorption of surrounding particles in a two-gas atmosphere are considered. Detailed derivations of mass fluctuation power spectral density and frequency fluctuation power spectral density are performed using analytical approach. The analogy between Shockley-Read generation-recombination processes of electrons in solids and adsorption-desorption processes of particles of a two gas atmosphere around the cantilever is shown. Simulation is given for a silicon microcantilever surrounded by nitrogen and hydrogen.
两种气体粒子的吸附和解吸引起的微悬臂梁的吸附质量和共振频率波动
考虑了两气环境中周围粒子的吸附和解吸引起的微悬臂谐振频率和质量波动。用解析法详细推导了质量波动功率谱密度和频率波动功率谱密度。给出了固体中电子的肖克利-里德生成-复合过程与悬臂梁周围两种气体气氛中粒子的吸附-解吸过程的类比。对氮和氢环绕的硅微悬臂梁进行了仿真。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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