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Early Stage Mechanisms in Time-Dependent Dielectric Breakdown in the Si/SiO2 System.

Proposed for presentation at the 52nd IEEE Semiconductor Interface Specialists Conference in , . Pub Date : 2021-12-01 DOI:10.2172/1903089
F. Sharov, S. Moxim, D. Hughart, G. Haase, P. Lenahan
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Si/SiO2体系中介电击穿的早期机制。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Proposed for presentation at the 52nd IEEE Semiconductor Interface Specialists Conference in , .
Proposed for presentation at the 52nd IEEE Semiconductor Interface Specialists Conference in , .
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