Time-dependent Multiple Gate Voltage Reliability of Hybrid Ferroelectric Charge Trap Gate Stack (FEG) GaN HEMT for Power Device Applications

S. K. Rathaur, Tsung-Ying Yang, Chih-Yi Yang, E. Chang, Heng-Tung Hsu, A. Dixit
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引用次数: 1

Abstract

This experimental study examines the time-dependent dielectric breakdown (TDDB) on a hybrid charge trap gate stack for the normally OFF operation of the Ferroelectric charge trap GaN High Electron Mobility Transistor (FEG-HEMT) at room temperature. The abrupt change in drain current shows the hard break down (HBD) of the charge trap gate stack. A hybrid charge trap gate stack provides the percolation path at the gate recess edge. Step gate stress has been used to figure out the breakdown voltage and device failure current which are found to be 20V and 2.14 μA/mm respectively. The fitted parameter β (Weibull distribution slope) has been analyzed for the multiple-gate stress voltage 17V, 18V, and 19V. Based on the power law, the lifetime prediction has been investigated for 63.2%, 10%, and 0.1% failure rates on fitting the data to gate voltage 13.5V, 13.1V, and 12.5V, respectively, by extrapolation up to 10 years.
用于功率器件的混合铁电电荷阱门栈(FEG) GaN HEMT的时变多门电压可靠性
本实验研究考察了室温下铁电电荷阱氮化镓高电子迁移率晶体管(fg - hemt)正常OFF操作时混合电荷阱栅极堆叠上的时间相关介电击穿(TDDB)。漏极电流的突变表明电荷阱栅极堆的硬击穿(HBD)。混合电荷阱栅极堆栈提供栅极凹槽边缘的渗透路径。采用阶跃栅应力计算击穿电压和器件失效电流,分别为20V和2.14 μA/mm。分析了多栅极应力电压17V、18V和19V时的拟合参数β(威布尔分布斜率)。基于幂律,对63.2%、10%和0.1%的故障率进行了寿命预测,分别将数据拟合为13.5V、13.1V和12.5V,外推至10年。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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