Aluminum based Two-Port-Clamped-Clamped Resonators

Abstract

In this paper a new structure of clamped-clamped muresonator (CCMR) of resonance frequency (fo) of 180 kHz, is designed, modeled, fabricated and tested, using aluminum as structural material. IntelliSuite simulator is used to model the mechanical properties of the new MEMS resonator using a static displacement analysis and to get the optimum values of the beams parameters. The effective spring constant and mass of the resonator were calculated using a special proposed simulator, based on Mapple, besides using it to model the mechanical parameters into equivalent electrical circuit for the resonator, and determine the electrical properties just by giving the physical dimensions of the muresonator. Surface micromachining technology was used to fabricate the proposed MEMS resonator in IMEN's Clean Room.