A novel technique to reduce leakage in metal-semiconductormetal photodetectors

A. Okyay, C. O. Chui, K. Saraswat
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Abstract

High efficiency and low power photodetectors operating at low absorption regions of silica fibers are attractive for both long distance and chip scale communications. Optical interconnects are promising to alleviate many limitations faced by their electrical counterparts (Miller, 2000). Easy integration of photodetectors with mainstream Si-ICs is a key aspect to realize on-chip optical clocking/signaling on dense integrated systems. Among various photodetector structures, metal-semiconductor-metal photodetectors (MSM-PDs) are attractive for their high sensitivity-bandwidth product, low capacitance and remarkable ease of integration. However, relatively large dark current (Idark) associated with a lower bandgap and thus low Schottky barrier MSMs (vs. PIN diodes (Oh et al.,2002)) like Ge and Si, poses additional power dissipation, an increasingly serious problem in today's dense integrated systems. In addition, the resultant increase in noise level demands higher optical powers for minimum detectable signal. The paper have investigated the possibility to suppress leakage current by utilizing asymmetric-area contacts on a basic MSM structure with two back-to-back Schottky diodes. Under an applied bias, an identical current flowing through the unequal area electrodes, results in an enhanced depletion at the smaller-area contact due to higher electric field at this electrode. This in turn decreases the reach through voltage, the applied bias at which the sum of the depletion widths extends through the electrode separation (i.e. total depletion operating condition). 2D MEDICItrade simulations of Si-based interdigitated MSM structures were used to verify dark current reduction with this area asymmetry scheme
一种减少金属-半导体-金属光电探测器漏损的新技术
在硅纤维的低吸收区工作的高效率和低功率光电探测器对于长距离和芯片级通信都具有吸引力。光互连有望缓解电互连所面临的许多限制(Miller, 2000)。光电探测器与主流si - ic的容易集成是在密集集成系统上实现片上光时钟/信号的关键方面。在各种光电探测器结构中,金属-半导体-金属光电探测器(msm - pd)以其高灵敏度-带宽产品、低电容和显著的易于集成而具有吸引力。然而,相对较大的暗电流(Idark)与较低的带隙相关,因此具有较低的肖特基势垒(相对于PIN二极管(Oh et al.,2002)),如Ge和Si,会带来额外的功耗,这是当今密集集成系统中日益严重的问题。此外,由此产生的噪声水平的增加需要更高的光功率来实现最小可检测信号。本文研究了在具有两个背靠背肖特基二极管的基本MSM结构上利用非对称面积触点抑制泄漏电流的可能性。在施加偏置的情况下,相同的电流流过不等面积的电极,由于该电极处较高的电场,导致小面积接触处的损耗增强。这反过来又降低了通达电压,即通过电极分离的耗尽宽度之和所施加的偏置(即总耗尽操作条件)。采用二维MEDICItrade模拟si基交叉指状MSM结构,验证了该面积不对称方案的暗电流降低效果
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