Epoxy Degradation Induced Au-Al Intermetallic Void Formation in Plastic Encapsulated MOS Memories

R. J. Gale
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引用次数: 25

Abstract

Previous high temperature aging studies have shown that the presence of epoxy in integrated circuit packages degrades the strength and contact resistance of Au-Al bonds [1-3]. Cl impurities in the resin or Br from the flame retardant or both are associated with this phenomenon. High temperature aging experiments were performed with Au wire bonded, Al metallized 4K NMOS Static RAMs and epoxy molding compounds in two types of DIPs. The initial study focussed on the effect of the flame retardant by using the epoxy with and without flame retardant in the cavities of epoxy sealed ceramic DIPs. The apparent activation energy for the degradation was determined by aging devices molded in DIPs using the standard flame-retardant formulation at three temperatures. The Cl and Br content of the epoxies was measured by neutron activation analysis and water extraction. Electron and ion microprobe analysis showed that Cl and Br are present in the bond zone with the Au-Al intermetallics. The median life at 180°C was only a factor of three higher without the flame retardant, even though the Br content was 600 times lower, suggesting that the Cl plays a major role. The apparent activation energy for the bond degradation in the flame-retardant molding compound is ~0.8 eV, within experimental error of that for pure Au-Al intermetallic formation [4] and that for the breakdown of the brominated flame retardant determined by water extraction. The water extraction results also indicate that the chlorinated impurities are less thermally stable than the brominated flame retardant.
环氧树脂降解诱导塑料封装MOS存储器中金铝金属间空隙的形成
先前的高温老化研究表明,集成电路封装中环氧树脂的存在会降低Au-Al键的强度和接触电阻[1-3]。树脂中的Cl杂质或阻燃剂中的Br或两者都与此现象有关。对金丝键合、铝金属化4K NMOS静态ram和环氧模化化合物在两种dip中进行了高温老化实验。初步研究了带阻燃剂和不带阻燃剂的环氧树脂在环氧密封陶瓷蘸料腔内的阻燃效果。通过使用标准阻燃剂配方在三种温度下在dip中成型的老化装置,确定了降解的表观活化能。用中子活化法和水萃取法测定了环氧树脂中Cl和Br的含量。电子探针和离子探针分析表明,在与金铝金属间化合物的结合区存在Cl和Br。在180°C下,没有阻燃剂的中位寿命只增加了3倍,尽管Br含量降低了600倍,这表明Cl起了主要作用。阻燃成型化合物中键降解的表观活化能为~0.8 eV,在纯Au-Al金属间形成的表观活化能[4]和水萃取法测定的溴化阻燃剂击穿表观活化能的实验误差范围内。水萃取结果还表明,氯化杂质的热稳定性不如溴化阻燃剂。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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