Ampacity and electrical properties of thermally treated ultrathin carbon membranes grown by focused ion beam induced deposition of phenanthrane

Abstract

There is a strong interest on the graphene integration into planar technologies, but synthesis compatibility remains challenging. In contrast, for some electronic applications, as those related with liquid crystal displays, strictly single layer graphene is not required. Previously, we proposed an original method for the growth, purification and crystallization of patterned ultrathin carbon membranes based on focused ion beam induced deposition (FIBID) of phenanthrane molecules followed by heat treatment, directly on dielectric substrates. Here, the electrical characterization of two kinds of thermally processed FIBID-C membranes is presented. Resistivity values of nanographene and graphite-like carbon patterns are understood in relation to sp2/sp3, chemical composition, phase ordering and crystallites size. Ultrathin conductive carbon membranes sustain remarkably high current densities.