S. Mizrakhy, P. Nesterov, Igor Nesterov, V. Bezborodov, D. Vinnikov, V. Yuferov
{"title":"Millimeter Wave Interferometer Development for the Stand with Plasma Gun","authors":"S. Mizrakhy, P. Nesterov, Igor Nesterov, V. Bezborodov, D. Vinnikov, V. Yuferov","doi":"10.1109/ELNANO54667.2022.9927119","DOIUrl":null,"url":null,"abstract":"Millimeter-wave interferometer has been developed and preliminarily studied for the stand with a plasma gun. The high-density plasma can exist in the developed plasma stand using arc discharge at the vacuum chamber. Such techniques are used for plasma processing in the manufacturing and material sciences. Quasioptical antennas as well as sealing and structural elements for their installation inside plasma gun ports have been developed. The tests of the developed interferometer and antennas were performed.","PeriodicalId":178034,"journal":{"name":"2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-10-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ELNANO54667.2022.9927119","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Millimeter-wave interferometer has been developed and preliminarily studied for the stand with a plasma gun. The high-density plasma can exist in the developed plasma stand using arc discharge at the vacuum chamber. Such techniques are used for plasma processing in the manufacturing and material sciences. Quasioptical antennas as well as sealing and structural elements for their installation inside plasma gun ports have been developed. The tests of the developed interferometer and antennas were performed.