Mechanical Strength and Dislocation Velocities in GeSi Alloys

I. Yonenaga, K. Sumino
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引用次数: 2

Abstract

The mechanical strength and dislocation velocities in single crystal Ge 1-x Si x alloys grown by the Czochralski method were investigated by compressive deformation and by the etch pit technique, respectively. In the temperature range 450-700°C and the stress range 3-20 MPa, the dislocation velocity in the GeSi with x = 0.004-0.022 decreases monotonically with an increase in the Si content, reaching about a half of that in Ge at x = 0.022, and can be expressed as a function of the stress and the temperature as expressed by the empirical equation known in other semiconductors. The yield stress of the GeSi alloy increases with increasing Si content from x = 0 to 0.4 and is temperature-insensitive at high temperatures, showing that the flow stress of alloy semiconductor has an athermal component which is absent in elemental or compound semiconductors. The hardening mechanism in alloy semiconductors is discussed.
GeSi合金的机械强度和位错速度
采用压缩变形法和蚀刻坑法分别研究了chzochralski法生长的ge1 - xsix单晶合金的机械强度和位错速度。在温度450 ~ 700℃,应力3 ~ 20 MPa范围内,x = 0.004 ~ 0.022的GeSi中位错速度随Si含量的增加而单调减小,在x = 0.022时达到Ge中位错速度的一半左右,可以用其他半导体中已知的经验方程表示为应力和温度的函数。从x = 0到0.4,GeSi合金的屈服应力随Si含量的增加而增大,且在高温下对温度不敏感,表明合金半导体的流动应力具有单质或化合物半导体所没有的非热成分。讨论了合金半导体的硬化机理。
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