SAW pressure sensors

Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9) Pub Date : 1994-05-10 DOI:10.1109/IMTC.1994.351789

I.B. Yarovkin, Yu.N. Vlassov, A. Kozlov, N.S. Pashchin

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引用次数: 6

Abstract

The design and performance of two types of SAW pressure sensors have been considered. SAW resonator oscillators with metal strip gratings designed for operation at 200 and 360 MHz have been used in both type devices to study the opportunity of the mechanical pressure measurement became of mechanical loading on Rayleigh surface wave propagation. Such electrical characteristics of SAW resonator as amplitude and phase response are discussed, as well as a geometrical dimensions of the sensitive element and a disposition of SAW structures on it. The sensitivity and the non linearity of both sensors with a sensitive element shaped as an integral crystal diaphragm and sensor with mechanically loaded quartz plates measured and discussed too. Experimental data clearly show that sensitivity and threshold are not independent parameters for this kind of pressure sensor. We studied the opportunity to optimize this parameters for a given pressure range. Finally, recommendations are made for optimal configuration of SAW pressure sensor according to pressure and dynamic range demands. These results are important for the design of SAW pressure sensors intended for operation in gaseous or liquid media.<>

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SAW压力传感器

对两种SAW压力传感器的设计和性能进行了分析。设计了工作频率为200 MHz和360 MHz的金属条形光栅声表面波谐振振荡器，研究了机械载荷对瑞利表面波传播的机械压力测量机会。讨论了声表面波谐振器的振幅和相位响应等电特性，以及敏感元件的几何尺寸和声表面波结构在其上的布置。对整体晶体膜片敏感元件传感器和机械加载石英片传感器的灵敏度和非线性进行了测量和讨论。实验数据清楚地表明，对于这种压力传感器，灵敏度和阈值不是独立的参数。我们研究了在给定压力范围内优化这些参数的机会。最后，根据压力和动态范围的要求，对SAW压力传感器的优化配置提出了建议。这些结果对于设计用于在气体或液体介质中工作的SAW压力传感器具有重要意义

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Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)

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