High reliability non-hermetic 0.15 /spl mu/m GaAs pseudomorphic HEMT MMIC amplifiers

D. Leung, Y. Chou, C. Wu, R. Kono, J. Scarpulla, R. Lai, M. Hoppe, D. Streit
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引用次数: 24

Abstract

High reliability performance of a Ka-band low-noise MMIC amplifier fabricated using a 0.15 /spl mu/m production AlGaAs-InGaAs-GaAs HEMT process technology is reported. Operating at an accelerated DC bias condition of Vds=5.2 V and Ids=250 mA/mm, two-stage balanced amplifiers were lifetested at three-temperatures (T/sub ambient/=235/spl deg/C, T/sub ambient/=250/spl deg/C, and T/sub ambient/=265/spl deg/C) in air ambient. Failure time for each temperature was determined using /spl Delta/S21=-1.0 dB measured at room temperature as the failure criteria. The activation energy (Ea) is 1.6 eV, achieving a projected median-time-to-failure (MTF) of 7/spl times/10/sup 9/ hours at a 125/spl deg/C junction temperature. This is the first report of 0.15 /spl mu/m HEMT reliability based on S21 failure criteria of MMIC amplifiers under DC stress at high junction temperature in air ambient. This result demonstrates a robust HEMT technology immune to the stress effects of high electric field under high temperature operation suitable for non-hermetic commercial Ka-band applications.
高可靠性非密封式0.15 /spl μ m GaAs伪晶HEMT MMIC放大器
报道了采用0.15 /spl μ l /m量产AlGaAs-InGaAs-GaAs - gaas HEMT工艺制作的ka波段低噪声MMIC放大器的高可靠性性能。在Vds=5.2 V、Ids=250 mA/mm的加速直流偏置条件下,对两级平衡放大器进行了空气环境下三种温度(T/亚环境/=235/spl°C、T/亚环境/=250/spl°C和T/亚环境/=265/spl°C)的寿命测试。每个温度下的失效时间以室温下测量的/spl Delta/S21=-1.0 dB作为失效标准来确定。活化能(Ea)为1.6 eV,在125/spl℃结温下,预计的中位失效时间(MTF)为7/spl次/10/sup /小时。这是基于S21失效准则的MMIC放大器在空气环境中高结温直流应力下0.15 /spl mu/m HEMT可靠性的首次报道。这一结果证明了一种强大的HEMT技术,可以在高温下免受高电场的应力影响,适用于非密封的商业ka波段应用。
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