Reconfigurable MEMS metamaterials

Abstract

The properties of the metamaterials strongly depend on the geometrical shape and size of the subwavelength unit cell. Active control of metamaterial provides effective ways of manipulating electromagnetic waves in THz spectral domain. Reconfigurable microcantilevers integrated into programmable unit cells in various layouts have been investigated to realize novel tunable THz metamaterials. In this paper, we review the recent progress in the MEMS based reconfigurable metamaterials.