T. Ono, M. Esashi
{"title":"Silicon—based Nanomachining","authors":"T. Ono, M. Esashi","doi":"10.1002/1616-8984(199911)6:1<163::AID-SEUP163>3.0.CO;2-2","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":154848,"journal":{"name":"Sensors Update","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors Update","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/1616-8984(199911)6:1<163::AID-SEUP163>3.0.CO;2-2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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