Electrical behavior of devices composed by dielectrophoretically deposited carbon nanotubes for gas sensing applications

2014 29th Symposium on Microelectronics Technology and Devices (SBMicro) Pub Date : 2014-10-30 DOI:10.1109/SBMICRO.2014.6940131

Marcos Moraes, E. Galeazzo, H. Peres, M. Dantas, F. J. Ramirez-Fernandez

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引用次数: 1

Abstract

Miniaturized gas sensors have been developed with a view to integrating them into smart systems for environment control, for example. Intensive research has been focused on investigating new sensing materials, such as carbon nanotubes (CNT) because of their promising characteristics, but there are challenges related to their application in commercial devices such as sensitivity, compatibility, and complexity of miniaturization, among others. We report the study of the electrical behavior of multi-walled carbon nanotubes (MWCNT) material deposited between interdigitated electrode structures by means of dielectrophoresis (DEP), which is a simple and cost-effective method. The devices were fabricated by varying the DEP process time. Remarkable changes in their electric resistance in the presence of water vapor were noticed as a function of MWCNT quantities deposited. These results indicate that the charge exchange mechanisms on the CNT surface play an important role in the material resistivity.

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气敏用介质电泳沉积碳纳米管组成器件的电学性能

例如，微型气体传感器已经被开发出来，目的是将它们集成到智能系统中，用于环境控制。由于碳纳米管(CNT)等新型传感材料具有良好的特性，人们对其进行了深入的研究，但它们在商业设备中的应用面临着灵敏度、兼容性和小型化复杂性等方面的挑战。本文报道了用介电电泳(DEP)方法研究了多壁碳纳米管(MWCNT)材料的电学行为，这是一种简单而经济的方法。通过改变DEP工艺时间制备了器件。在水蒸气存在的情况下，它们的电阻发生了显著的变化，这是沉积MWCNT数量的函数。这些结果表明碳纳米管表面的电荷交换机制对材料的电阻率起着重要的作用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2014 29th Symposium on Microelectronics Technology and Devices (SBMicro)

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