Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

Abstract

We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.