PMMA high sensitive capacitive micro accelerometer fabricated based on hot embossing

Abstract

This paper presents for the first time the fabrication and testing of a PMMA capacitive micro accelerometer based on hot embossing and ultra-precision machining. The detection principle of the PMMA micro accelerometer is based on closing-gap capacitive combs. Since the sensor is made of PMMA polymer, it would be very flexible, high sensitive and low cost. The PMMA micro accelerometer was tested and very high sensitivity of 0.4pF /G or equivalent to 0.16V/G/V was obtained.