Correlation of Analytical Facilities

Abstract

New and emerging technologies such as VHSIC/VLSI and the expanded use of hybrids have presented a new series of problems in correlating analytical laboratory mass spectrometric moisture measurements. Standards and techniques, designed and tested for application in the more benign environment of smaller scale monolithic packaging, may not be directly applicable to new adsorption/desorption conditions and relatively large ( ¿lcc) sample gas volumes. The development of moisture standards is traced from the original Method 1018.2 (Internal Water Vapor Content) analytical laboratory certification program to the present. The results of several correlation experiments are presented, and the effect of time-temperature stress upon the stability of past and present standards is discussed. Design criteria for new standards is developed in order to solve both inherent sample problems and the challenge of tomorrow's technologies. Current efforts in this area are summarized. Semiconductor product moisture analysis data not only supports previously determined laboratory correlations but also positively establishes the success of Method 1018.2 in reducing the potential inclusion of moisture reliability hazards in military systems.