Passive temperature compensation method in nonlinear NEMS resonators based on the nonlinear duffing effect

Abstract

This paper reports on the experimental study of the frequency thermal dependence of a DETF NEMS resonator operated in the nonlinear regime. We show that the linear dependence of the DETF resonator (251 ppm/°C) is compensated just by operating the resonator in the nonlinear regime, improving the thermal stability of the resonance frequency from 10100 ppm to 1600 ppm, over a temperature range from -40°C to 0°C. As a result, a new technique to passively compensate the thermal dependence of the resonance frequency in M/NEMS resonators is proposed.