R. Casquel, M. Holgado, C. Molpeceres, M. Morales, J. Ocaña
{"title":"Photonic sensors based on integrated reflectivity, ellipsometry and spectrometry measurements in submicron size geometries","authors":"R. Casquel, M. Holgado, C. Molpeceres, M. Morales, J. Ocaña","doi":"10.1109/SCED.2007.384062","DOIUrl":null,"url":null,"abstract":"We have developed micro-nano structures as photonic sensors based on the observation of external reflectivity profiles. Spectra interference patterns as a function of the angle of incidence for both s and p polarizations directions as well as a phase shift between s and p polarisation are obtained. Also the reflectivity of the photonic structures is calculated and analyzed over a wide range of wavelengths of light as well. The sub-micro holes of the photonic structure have been evaluated with several refractive indices. As a result, the change in the effective refractive index involved by the optical liquids produces variations in the phase shift and the interference reflectivity patterns, making the system suitable for chemical, biochemical and pharmaceutical applications. The theoretical results of the integrated reflectivity, ellipsometry and spectrometry measurements ensure sensitive, accurate and reliable optical sensing detection.","PeriodicalId":108254,"journal":{"name":"2007 Spanish Conference on Electron Devices","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 Spanish Conference on Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SCED.2007.384062","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We have developed micro-nano structures as photonic sensors based on the observation of external reflectivity profiles. Spectra interference patterns as a function of the angle of incidence for both s and p polarizations directions as well as a phase shift between s and p polarisation are obtained. Also the reflectivity of the photonic structures is calculated and analyzed over a wide range of wavelengths of light as well. The sub-micro holes of the photonic structure have been evaluated with several refractive indices. As a result, the change in the effective refractive index involved by the optical liquids produces variations in the phase shift and the interference reflectivity patterns, making the system suitable for chemical, biochemical and pharmaceutical applications. The theoretical results of the integrated reflectivity, ellipsometry and spectrometry measurements ensure sensitive, accurate and reliable optical sensing detection.