Optimal Design on Saw Strain Sensor at High-Temperature

Abstract

Nowadays, strain online monitoring technology of high-temperature components plays an important role in ensuring accurate operation and safe production in the fields of aerospace, nuclear power and power plants. A SAW high-temperature strain sensor employing composite structure of based Al2O3/ IDTs/ AlN/ Metal/ Al2O3 is proposed to obtain strain information at extreme high-temperature environment. Obviously, high performance as Q-value and low insertion loss of the sensing chip is the key for achieving successful wireless strain sensing system. In this work, the theoretical simulation by using the finite element method (FEM) analysis was performed to realize the SAW propagation in multi-layered composite structures, and corresponding coupling of modes (COM) parameter was extracted. On this basis, the optimal design on the SAW high-temperature strain sensing device was realized.