Electrically Pumped Quantum-Dot Lasers Grown on CMOS-Compatible 300 mm Si Wafers

Kaiyin Feng, C. Shang, E. Hughes, R. Koscica, A. Clark, M. Debnath, G. Leake, D. Harame, P. Ludewig, J. Bowers
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Abstract

We demonstrate the first electrically pumped quantum-dot (QD) lasers grown on recessed 300 mm Si wafers, with maximum CW lasing output power of 125 mW at 20 °C. This significant advance in heteroepitaxial integration of III-V gain elements onto existing CMOS-compatible Si photonic circuits is promising for photonic integrated circuit integration.
在cmos兼容的300毫米硅晶圆上生长的电泵量子点激光器
我们展示了在300mm嵌入式硅晶圆上生长的第一个电泵浦量子点(QD)激光器,在20°C下的最大连续波激光输出功率为125 mW。将III-V增益元件异质外延集成到现有的cmos兼容硅光子电路上的这一重大进展,为光子集成电路集成提供了前景。
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