Practical considerations for parameterized model order reduction of MEMS devices

Abstract

An algorithm for automatic generation of a MEMS device parameterized model from finite element analysis is proposed. Traditional model order reduction techniques via singular value decomposition are adapted for use with the large system matrices of the finite element method. The paper addresses and proposes solutions to practical issues concerning model order reduction when applied to finite element equations. Mesh generation, condition number and size of matrices are typical issues that are encountered. MEMS examples are studied to highlight these issues and to prove the effectiveness of such a model in reducing the system size significantly, while performing with high accuracy over a large range of parameter values.