Simulation of test wafer consumption in a semiconductor facility

B. Foster, D. Meyersdorf, J. M. Padillo, R. Brenner
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引用次数: 18

Abstract

A discrete event simulation methodology was developed to assist in managing test wafer usage in semiconductor fabs. The purpose of modeling test wafer usage is to predict the number of new test wafers required, test wafer WIP levels, and how to downgrade test wafers to reduce costs of purchasing new test wafers. The test wafer simulation methodology is a detailed yet accurate way to predict test wafer consumption. The methodology has been implemented in a 200 mm development facility, resulting in considerable cost savings by reducing the overall WIP levels of test wafers.
半导体设备中测试晶圆消耗的模拟
开发了一种离散事件模拟方法,以协助管理半导体晶圆厂的测试晶圆使用。对测试晶圆使用情况进行建模的目的是预测所需的新测试晶圆数量、测试晶圆WIP水平,以及如何降级测试晶圆以降低购买新测试晶圆的成本。测试晶圆模拟方法是预测测试晶圆消耗的一种详细而准确的方法。该方法已在200mm开发设施中实施,通过降低测试晶圆的整体在制品水平,节省了相当大的成本。
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