Simulating nonlinear dynamics and chaos in a MEMS cantilever using poincare mapping

Abstract

We have used Poincare mapping to find and characterize nonlinear dynamics and chaos in a periodically forced, electrostatically actuated MEMS cantilever intended for a probe-based data storage chip. The results show significant chaotic regions in the excitation parameter space that would not be found with standard Simulink-type simulations for both open and closed loop control of the cantilever. For one case the stable operation range is reduced by 25% because of a chaotic response. We have also found a region of bi-stability for the closed loop at low gain.