T. Ohsawa, T. Higashi, K. Fujita, K. Hatsuda, N. Ikumi, T. Shino, H. Nakajima, Y. Minami, N. Kusunoki, A. Sakamoto, J. Nishimura, T. Hamamoto, S. Fujii
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引用次数: 9
Abstract
A 128Mbit FBRAM using the floating body cell (FBC) the size of 0.17mum2 (6.24F2 with F=0.165mum) was successfully fabricated and a high bit yield (~99.999%) was obtained