MEMS technology in seismology: A short review

Abstract

Great advancements in the broad field of the seismic monitoring have been achieved in the last decades mainly because of the technical advancement of the instrumentation. Also the seismic monitoring applications greatly developed, mainly since the 1990s owing to the Micro Electro-Mechanical Systems (MEMS) technology. In this short review we outline the applications of the MEMS technology in various sectors of broad field of seismology, distinguishing three main areas of interest and summarizing the state of the art and the most recent progresses.