Polymer Ablation With A High Power Excimer Laser Tool In Manufacturing

Proceedings of Japan International Electronic Manufacturing Technology Symposium Pub Date : 1993-06-09 DOI:10.1109/IEMT.1993.639286

G. Wolbold, C. L. Tessle, D. J. Tudryn

引用次数: 0

Abstract

1. ABSTRACT This DaPeS is a descriDtion of the 3. THE STEP AND REPEAT SYSTEM ablation of polyimide bith an excimer laser ablation tool in a manufacturing line. The light source is a 150 watt, XeCl ( 308 nm ) gas laser. The projection ablation unit is very similar to that of a photo expose tool. The laser, beam delivery system, projection optics, beam homogenization, system accuracy, process, process control and system reliability will be discussed.

查看原文本刊更多论文

高功率准分子激光刀具在制造中的聚合物烧蚀

1. 摘要:这篇论文是对3。在生产线上用准分子激光烧蚀工具对聚酰亚胺进行步进和重复系统烧蚀。光源是150瓦XeCl (308 nm)气体激光器。投影消融装置与照相曝光工具非常相似。将讨论激光、光束输送系统、投影光学、光束均匀化、系统精度、过程、过程控制和系统可靠性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Proceedings of Japan International Electronic Manufacturing Technology Symposium

自引率

0.00%

发文量