Design of CMUT Cells for High-intensity Focused Ultrasound Applications

Abstract

The advancements in fabrication technology have led to significant developments in MEMS -based capacitive micromachined ultrasonic transducer (CMUT) devices, which have several ultrasound applications. This work discusses the modeling and simulation of CMUTs to derive ultrasound frequencies suitable for HIFU applications using COMSOL® Multiphysics. It can be used for catheter-based monitoring of diseased tissues ablation in the human body. Polysilicon and SiO2 have been used for the top membrane. The bottom membrane is made of silicon for the circular CMUT cell. We performed eigen-frequency studies and pull-in voltage inspection of the CMUT device. The analytical calculations are performed using MATLAB®.