CMOS photosensors for LIDAR

Abstract

In this paper photosensors for CMOS LIDAR intended for non-invasive biosensing are presented. Adequate depth resolution requires high-speed sampling and high-speed photosensors, hard to make in standard CMOS. In this paper CMOS photodiodes are evaluated with respect to speed and sensitivity designed for use in a single-chip LIDAR system. Diodes dimensions are quite small $(5 \mu m \times 5 \mu m)$ suited for larger arrays. Simple assessment circuits are used in combination with high-speed optical instrumentation for characterization of different photosensors structures fabricated in standard $90 nm$ CMOS.