A Proposal For The Corrosive Gas Distribution System

E. Ozawa
{"title":"A Proposal For The Corrosive Gas Distribution System","authors":"E. Ozawa","doi":"10.1109/ISSM.1994.729446","DOIUrl":null,"url":null,"abstract":"Each failure has a unique cause. Main causes of failures in corrosive gas line are human error in gas handing, bad function of pressure regulator due to corrosion and the corrosion of materials around welding sites. If these problems can be eliminated from the corrosive gas line, we will be able to realize much safer and higher-quality gas line. Establishment of good purging procedure, the usage of low Mn 316L, local usage of high corrosion resistant materials like Hastelloy etc. are the suitable and cost effective counterplan for corrosion problems.","PeriodicalId":114928,"journal":{"name":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.1994.729446","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

Each failure has a unique cause. Main causes of failures in corrosive gas line are human error in gas handing, bad function of pressure regulator due to corrosion and the corrosion of materials around welding sites. If these problems can be eliminated from the corrosive gas line, we will be able to realize much safer and higher-quality gas line. Establishment of good purging procedure, the usage of low Mn 316L, local usage of high corrosion resistant materials like Hastelloy etc. are the suitable and cost effective counterplan for corrosion problems.
腐蚀性气体分配系统的设计方案
每次失败都有一个独特的原因。造成腐蚀性气体管路故障的主要原因是人为操作失误、压力调节器因腐蚀而作用不良以及焊接部位周围材料腐蚀。如果这些问题能够从腐蚀性气体管道中消除,我们将能够实现更安全,更高质量的气体管道。建立良好的清洗程序,使用低锰316L,局部使用高耐腐蚀材料,如哈氏合金等,是解决腐蚀问题的合适且经济有效的对策。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信