{"title":"A Proposal For The Corrosive Gas Distribution System","authors":"E. Ozawa","doi":"10.1109/ISSM.1994.729446","DOIUrl":null,"url":null,"abstract":"Each failure has a unique cause. Main causes of failures in corrosive gas line are human error in gas handing, bad function of pressure regulator due to corrosion and the corrosion of materials around welding sites. If these problems can be eliminated from the corrosive gas line, we will be able to realize much safer and higher-quality gas line. Establishment of good purging procedure, the usage of low Mn 316L, local usage of high corrosion resistant materials like Hastelloy etc. are the suitable and cost effective counterplan for corrosion problems.","PeriodicalId":114928,"journal":{"name":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.1994.729446","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Each failure has a unique cause. Main causes of failures in corrosive gas line are human error in gas handing, bad function of pressure regulator due to corrosion and the corrosion of materials around welding sites. If these problems can be eliminated from the corrosive gas line, we will be able to realize much safer and higher-quality gas line. Establishment of good purging procedure, the usage of low Mn 316L, local usage of high corrosion resistant materials like Hastelloy etc. are the suitable and cost effective counterplan for corrosion problems.